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Projects and Results

Current SEA Projects

Please note that this page includes links to PDFs (average size - 300kb). You will need the Adobe Acrobat Reader in order to view these files and the Reader can be downloaded free of charge from the Adobe web site.

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Theme:Deposition/Growth Processes
Project Description Acronym Synopsis/Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Deposition equipment for FPD fabrication DEPODIS PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Unaxis Balzers Thales Avionics
MOCVD for ferroelectric layer deposition for 200/300mm FECLAM PDF document - Adobe Acrobat is required to view this document   PDF document - Adobe Acrobat is required to view this document   Aixtron FhG-IIS
Low energy PECVD hetero-epitaxy LEPECVD300 PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Unaxis STMicroelectronics
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Theme: Lithography
Project Description Acronym Synopsis / Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Advanced lithography using ArF wide field step & scan ALASCA PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document ASML IMEC
Photomask resist coater and aqueous developer APHRO PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   STEAG HamaTech IMS
Metrology of Critical Dimensions on Reticle McD'OR PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document MueTec
PDF Solutions		 Compugraphics
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Theme:Etch
Project Description Acronym Synopsis / Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
System and process for deep etching with double etch rate I-SPEEDER PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document ADIXEN Bosch
Microsystems production evaluated cluster tool MICROSPECT PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document This icon links to web page STS QinetiQ
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Theme: Cleaning
Project Description Acronym Synopsis/ Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Resist and organic residue removal for FEOL and BEOL NOW PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Mattson Wet Products Atmel
Oxidation and epitaxy preclean OXEPICLE PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Mattson Wet Products STMicroelectronics
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Theme:Interconnect Processes
Project Description Acronym Synopsis / Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Advanced CVD tool for integration of organosilicate nanoporous films ACTION PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document Trikon Technologies STMicroelectronics
ALCVD for Cu dual damascene process ATOL PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   ASMI IMEC
High throughput ALCVD batch equipment HALE&RAPID PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document
 PDF document - Adobe Acrobat is required to view this document
   ASMI Infineon
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Theme:Analysis/Metrology
Project Description Acronym Synopsis Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Advanced process control for 300mm plasma production APC300 PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document This icon links to a web page ASI SC300
Combined X-ray fluorescence and reflectivity COMBIMEXX PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Jordan Valley AR CEA-LETI
Defect review via e-beam induced Auger microanalysis DREAMS PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   FEI STMicroelectronics
Inline SIMS assessment ILSIMS PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Cameca STMicroelectronics
Microcalorimeter type EDX system assessment MESA PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document This icon links to a web page   CSP Infineon
Surface measurement system with integrated TXRF SUMMIT PDF document - Adobe Acrobat is required to view this document   PDF document - Adobe Acrobat is required to view this document   GeMeTec GeMeTec
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Theme:Assembly
Project Description Acronym Synopsis Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Anisotropic conductive film die bonder assessment AFIDA PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Cybernetix Thales
Microsonics
Low cost anodic bonder for MST products ANAB PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   AML Silicon Sensing
High resolution X-ray laminography equipment EXCEL PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Skyscan Alcatel Microelectronics
Flip-chip die bonder for ultrathin silicon FLIBUSI PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document This icon links to a web page Datacon FhG-ISIT
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Theme:Test
Project Description Acronym Synopsis / Equipment Factfile Results Bulletin Other Publications Equipment Supplier Evaluation Site
Mixed signal reliability test system MIDAS PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document PDF document - Adobe Acrobat is required to view this document   Reltech AMI
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